| 介质阻挡放电电压对阳极键合材料表面性能的影响 |
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| 引用本文： | 方智立,潘明强,李正潮,陈立国.介质阻挡放电电压对阳极键合材料表面性能的影响[J].科学技术与工程,2017,17(16). |
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| 作者姓名： | 方智立 潘明强 李正潮 陈立国 |
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| 作者单位： | 苏州大学,苏州大学,苏州大学,苏州大学 |
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| 摘 要： | 通过亲水角和表面形貌两个标准,探究了介质阻挡放电电压对低温阳极键合材料性能的影响。实验采用1 mm厚的玻璃片和2 mm厚的氧化铝陶瓷片作为阻挡介质,在放电时间为10 s,放电间隙1.5 mm的放电条件下进行活化。实验表明,放电电压为24 kV时,活化效果较好,此时玻璃片亲水角14.3°,硅片亲水角33.5°,玻璃片粗糙度为0.643 nm,硅片粗糙度0.419 nm。
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| 关 键 词： | 介质阻挡放电 低温 阳极键合 亲水角 |
| 收稿时间： | 2016/11/22 0:00:00 |
| 修稿时间： | 2017/1/11 0:00:00 |
Effect of Dielectric Barrier Discharge Voltage on Surface Properties of Anode Bonding Material |
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| Fang Zhili,PAN Mingqiang,LI Zhengchao and.Effect of Dielectric Barrier Discharge Voltage on Surface Properties of Anode Bonding Material[J].Science Technology and Engineering,2017,17(16). |
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| Authors: | Fang Zhili PAN Mingqiang LI Zhengchao and |
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| Institution: | Soochow University,,, |
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| Abstract: | The effect of dielectric barrier discharge voltage on the properties of low temperature anodic bonding materialswas investigated by two criteria, hydrophilic angle and surface topography.In the experiment, 1mm thick glass plate and 2mm thick alumina ceramic plate were used as the dielectrics, and the activation time is 10s and discharge gap is 1.5mm.The experimental results show that the activation effect is best when the voltage is 24KV. |
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| Keywords: | dielectric barrier discharge low temperature anodic bonding hydrophilic angle |
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