变刚度悬丝支撑微纳测头的结构参数优化与动态特性分析

构造了一种基于悬丝约束支撑的变刚度微纳测头。利用压电装置驱动柔性机构变形,改变悬丝所受的轴向张紧力及横向刚度,进而改变测头约束支撑机构的整体刚度。通过正交试验法优化测头的各项结构参数,确定最优尺寸。基于有限元方法,仿真验证测头的各向同性、灵敏度、固有频率及瞬态响应等性能。通过仿真得到测头刚度关于悬丝轴向伸长量的变化曲线,结果表明测头具有一定的变刚度性能。提出的变刚度测头丰富了现有测头的结构形式,研究成果对该类型结构形式的测头的实际应用奠定了前期基础。

Structure Parameter Optimization and Dynamic Analysis of Variable Stiffness Micro-nano Probe with Wire Support Suspension

A variable stiffness micro-nano probe was constructed based on the suspension wire constraint support. The piezoelectric device was used to drive the deformation of the flexible mechanism to change the axial tension and the transverse stiffness of the suspension wire, and then changing the overall stiffness of the constraint mechanism supporting the probe. The orthogonal test method was used to optimize the structural parameters of the probe, and determine the optimal dimensions. The isotropy, sensitivity, natural frequency and transient response of the probe were verified by the finite element method. The curve of the probe"s stiffness respecting the axial extension of suspension wire was obtained by applying the simulation. The result indicates that the probe has a certain variable stiffness performance. The proposed variable stiffness probe enriches the structure of the existing probe, and the research results laid a foundation for the practical application of this type of structural probe.