微加速度计多失效模式可靠性分析

以梳齿式电容微加速度计为研究对象,开展考虑刚度失效、黏附失效等多个失效模式共同作用下的可靠性分析。首先,建立表征各失效模式的数学模型;并利用结构可靠度方法进行各失效模式的可靠性分析。然后,进行各失效模式的相关性分析,获得相关系数矩阵。最后,以各失效模式可靠性结果和相关系数矩阵为输入,建立微加速度计多失效模式可靠性分析模型;并进行相应的可靠性分析。一方面给出了微加速度计的可靠度,用于判别微加速计是否满足可靠度要求;另一方面给出了微加速度计各失效模式和各随机变量的量化的重要度排序,用于确定具有针对性的可靠性提高措施。

Reliability Analysis of Micro-accelerometer with Multi-failure Modes

Taking the multi-finger capacitive micro-accelerometer as an example, the reliability is analyzed while considering its multi-failure modes, such as stiffness deficiency, adhesion failure, etc. Firstly, mathematic models representing the various failure modes are built, which are then used for corresponding reliability analysis based on structural reliability methods. Secondly, the correlations among the failure modes are analyzed and the correlation matrix is then derived. Finally, using the reliability results of the all failure modes and the correlation matrix as inputs, the reliability model of the micro-accelerometer with multi-failure modes is established. Subsequently the accelerometer reliability index is obtained, which is usually used to justify the reliability accomplishment of the product design. The sensitivity results with respect to various failure modes and random variables can be also got, which are valuable reference for the product reliability improvement.