低温共烧陶瓷激光测厚系统设计与误差分析

基于提升低温共烧陶瓷（LTCC）厚度的检测精度、测量效率和可溯源性的需求，设计了一套LTCC激光测厚系统。针对测量精度难以满足需求的问题，对存在误差进行分析，采用厚度测量用调整夹具消除同轴度误差和线性度误差，优化设计结构降低倾角误差，循环传感器标定消除重复度误差，通过数据优化和滤波处理降低机械振动误差，提高了系统测量精度。与实际产品厚度数据对比，最终精度误差≤5?，符合产品的应用要求，具有广阔的应用市场。

Design and Error Analysis of the LTCC Laser Thickness Measuring System

Based on the need to improve the detection accuracy, efficiency and traceability of low-temperature co-fired ceramics (LTCC), a set of LTCC laser thickness measuring system is designed. For the problem of measuring accuracy is difficult to meet, analyze the error, using the thickness measurement with adjusting fixture to eliminate coaxial error and linearity error, the optimal design structure to reduce inclination error, cycle sensor calibration to eliminate repeatability error, through data optimization and filtering processing to reduce mechanical vibration error, improve the system measurement accuracy. Compared with the actual product thickness data, the final accuracy error is 5 ?, which meets the application requirements of the product and has a broad application market.