| 一种动静态测量结合及大小数记数分离的直流光栅测试系统 |
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| 引用本文： | 杨秀芳,乐静,周仁魁.一种动静态测量结合及大小数记数分离的直流光栅测试系统[J].西安理工大学学报,2004,20(2):210-214. |
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| 作者姓名： | 杨秀芳 乐静 周仁魁 |
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| 作者单位： | 1. 西安理工大学,机械与精密仪器工程学院,陕西,西安,710048
2. 中国科学院西安光机所,陕西,西安,710068 |
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| 摘 要： | 针对直流光栅测试系统分辨率低、精度难以提高的问题，提出了一种动静态测量结合、大小数记数分离的直流光栅测试系统。在光栅付相对移动的动态测量过程中，获得当量数为1／4光栅栅距的大数记数，在相对移动开始之前和结束之后的静态时刻，获得当量数为1／360光栅栅距的小数记数，最后通过大小数的正确结合，获得测量结果。
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| 关 键 词： | 动静态测量结合 大小数记数分离 直流光栅测试系统 |
| 文章编号： | 1006-4710(2004)02-0210-05 |
| 修稿时间： | 2003年9月28日 |
Direct Current(DC) Grating Measuring System with Big-Small Counting Separation and Dynamic-Static Measuring Combination |
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| YANG Xiu-fang,LE Jing,ZHOU Ren-kui.Direct Current(DC) Grating Measuring System with Big-Small Counting Separation and Dynamic-Static Measuring Combination[J].Journal of Xi'an University of Technology,2004,20(2):210-214. |
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| Authors: | YANG Xiu-fang LE Jing ZHOU Ren-kui |
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| Institution: | YANG Xiu-fang~1,LE Jing~1,ZHOU Ren-kui~2 |
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| Abstract: | With an aim at solving the problem of low resolution and accuracy in the system,a kind of DC grating measuring system with big-small counting separation and dynamic-static measuring combination is suggested in this paper. In the process of dynamic measurement of grating relative movement, the equivalent number obtained is the big count of the 1/4 of grating distance. In the static moment before and after the relative movement begins and ends,the equivalent number obtained is the small count of the 1/360 of grating distance. At last,the measured results are obtained via the big-small count right combination. |
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| Keywords: | dynamic-static measuring combination big-small counting separation direct current(DC)grating measuring system |
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