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基于复合封装薄膜的水汽透过率测试系统研究
引用本文:李晟,张建华,楼志斌,殷录桥.基于复合封装薄膜的水汽透过率测试系统研究[J].上海应用技术学院学报,2017,17(1):26-31.
作者姓名:李晟  张建华  楼志斌  殷录桥
作者单位:上海大学 新型显示技术及应用集成教育部重点实验室,上海大学 新型显示技术及应用集成教育部重点实验室,上海科学院,上海大学 新型显示技术及应用集成教育部重点实验室
摘    要:基于活泼金属(钙、镁)电学法设计研发了用于老化测试环境下的水汽透过率测试仪器,测试精度达到10-6 g·m~(-2)·d~(-1).利用本测试仪器测试了不同叠层次数的Al_2O_3/ZrO_2复合薄膜的水汽透过率,结果表明,多次叠层后的Al_2O_3/ZrO_2复合薄膜的水汽阻隔性能得到了较好提升.

关 键 词:柔性显示,薄膜封装,活泼金属电学法,水汽透过率
收稿时间:2017/2/22 0:00:00
修稿时间:2017/3/2 0:00:00

Development of test system for water vapor transmission rate in aging environment
Abstract:Flexible display is one of the hottest display technologies in the current display area. With the flexible display technology being more large-scale, the thin film encapsulation is recognized as the most promising emerging packaging technology. However, the moisture barrier properties of the thin film are an important criterion for judging the effect of packaging. In this paper, based on the method of active metal electrical test, a new type of water vapor transmission rate measurement system was designed and development, which can be used for aging environment. Deposited by ALD, the WVTR of the different layers Al2O3/ZrO2 thin films were studied. The result show that the moisture barrier properties of the Al2O3/ZrO2 composite films after stacking have been improved.
Keywords:flexible display  thin film encapsulation  electrical active metal method  water vapor transmission rate
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