| 基于聚焦离子束铣削的复杂微纳结构制备 |
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| 引用本文： | 徐宗伟,房丰洲,张少婧,韩涛,李建明.基于聚焦离子束铣削的复杂微纳结构制备[J].天津大学学报(自然科学与工程技术版),2009,42(1):91-94. |
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| 作者姓名： | 徐宗伟 房丰洲 张少婧 韩涛 李建明 |
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| 作者单位： | 徐宗伟,房丰洲,XU Zong-wei,FANG Feng-zhou(天津大学精密测量技术与仪器同家重点实验室,天津,300072;天津微纳制造技术有限公司,天津,300457);张少婧,韩涛,ZHANG Shao-jing,HAN Tao(天津大学精密测量技术与仪器同家重点实验室,天津,300072);李建明,LI Jian-ming(天津微纳制造技术有限公司,天津,300457)
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| 基金项目： | 高等学校学科创新引资计划 |
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| 摘 要： | 聚焦离子束铣削是一种灵活且高精度的微加工方法，探索通过聚焦离子来铣削进行复杂微纳米结构的加工过程．通过聚焦离子束铣削加工，利用灰度值精确控制离子柬加工时间，实现闪耀光栅以及正弦结构等复杂微纳结构的加工过程同时，利用聚焦离子束对原子力显微镜纳米管探针的长度进行高精度调控，其长度控制精度可以小于50nm．聚焦离子柬铣削技术为制备在各种科学工程领域应用的多种复杂微结构提供了有效途径．
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| 关 键 词： | 聚焦离子束 微加工 铣削 碳纳米管探针 原子力显微镜 |
Fabrication of Complicated Micronano Structures Using Focused Ion Beam Milling Method |
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| XU Zong-wei,FANG Feng-zhou,ZHANG Shao-jing,HAN Tao,LI Jian-ming.Fabrication of Complicated Micronano Structures Using Focused Ion Beam Milling Method[J].Journal of Tianjin University(Science and Technology),2009,42(1):91-94. |
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| Authors: | XU Zong-wei FANG Feng-zhou ZHANG Shao-jing HAN Tao LI Jian-ming |
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| Institution: | XU Zong-wei, FANG Feng-zhou, ZHANG Shao-jing, HAN Tao, LI Jian-ming ( 1. State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China ; 2. Tianjin Micronano Manufacturing Technology Limited Company, Tianjin 300457, China) |
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| Abstract: | Focused ion beam （FIB）milling is a flexible method with high precision for microfabrication. Fabrication of complicated micronano structures was studied using FIB milling method in this paper. By controlling the ion beam milling time precisely with grey-scale introduction, micronano blazed grating and sinusoidal structure were fabricated. The FIB milling method, with less than 50 nm shortening accuracy, was also applied to precisely shortening the carbon nanotube （CNT） probe used in atomic force microscope （ AFM）. The FIB milling technique provides an effective method for fabricating versatile micro-structures in various scientific and engineering fields. |
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| Keywords: | focused ion beam microfabrication mill carbon nanotube probe atomic force microscope |
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