| 金刚石薄膜沉积时等离子体发射光谱 |
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| 引用本文： | 夏义琴,刘传先.金刚石薄膜沉积时等离子体发射光谱[J].阜阳师范学院学报(自然科学版),1995(1):105-107. |
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| 作者姓名： | 夏义琴 刘传先 |
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| 作者单位： | 淮南师范专科学校 232001
(夏义琴)，淮南师范专科学校 232001(刘传先) |
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| 摘 要： | 本文从微波等离子体发射光谱中,研究不同条件下用微波等离子体辅助化学气相沉积(MPCVD)法沉积金刚石薄膜。讨论了微波功率和沉积压力变化时,分析等离子体中电子的平均能量,研究MPCVD 法沉积金刚石薄膜。
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| 关 键 词： | 等离子体 金刚石薄膜 发射光谱 |
Average -Ton Gives off Spectrum While Diamond Membrane Deposits |
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| Xia Yigin Liu Chuanxian.Average -Ton Gives off Spectrum While Diamond Membrane Deposits[J].Journal of Fuyang Teachers College:Natural Science,1995(1):105-107. |
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| Authors: | Xia Yigin Liu Chuanxian |
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| Abstract: | In this article, the deposit of diamond membrane is studied, in different conditisons, with the help of microwave average-ion to the chemical meteorology deposit, and the average energy of the electron in the average-ion and diamond mombrane deposit by MPCVD, are studied and analyzed, when the deposit pressure and the microwave power change. |
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| Keywords: | Plague Diamond film give off spectrum |
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