| 镁含量和热处理对Zn_(1-x)Mg_xO薄膜晶体结构的影响 |
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| 引用本文： | 王保明,吴约才,赵素贵.镁含量和热处理对Zn_(1-x)Mg_xO薄膜晶体结构的影响[J].安徽大学学报(自然科学版),2010,34(4). |
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| 作者姓名： | 王保明 吴约才 赵素贵 |
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| 作者单位： | 中国人民解放军炮兵学院,基础部,安徽,合肥,230031 |
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| 摘 要： | 采用溶胶-凝胶法在玻璃衬底上制备Zn1-xMgxO(x=0.1、0.2、0.3、0.4、0.5、0.6(mol))薄膜.X射线衍射谱测试结果发现,在0.1
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| 关 键 词： | 溶胶-凝胶法 Zn1-xMgxO薄膜 晶体结构 |
Effect of Mg content and annealing on the crystal structure of Zn1-xMgxO films |
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| WANG Bao-ming,WU Yue-cai,ZHAO Su-gui.Effect of Mg content and annealing on the crystal structure of Zn1-xMgxO films[J].Journal of Anhui University(Natural Sciences),2010,34(4). |
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| Authors: | WANG Bao-ming WU Yue-cai ZHAO Su-gui |
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| Institution: | WANG Bao-ming,WU Yue-cai,ZHAO Su-gui(Department of Basic Courses,Artillery College of PLA,Hefei 230031,China) |
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| Abstract: | The Zn1-xMgxO(x=0.1,0.2,0.3,0.4,0.5,0.6(mol))thin films were prepared on glass substrate by the Sol-Gel method.The X-ray diffraction results showed that when the value of x was between 0.1 and 0.3,the thin film had the structure of hexagonal wurtzite while the angel of the diffraction peak became bigger with x,and the MgO impurity phase segregated at x=0.4.For the sample with x=0.3 annealed at 500℃,the crystal quality of the films was improved with the increase of the rate of temperature rising from 5.0℃·min-1 to 6.0℃·min-1.For the same sample,the crystal quality of the films was improved with the increase in annealing temperature from 500℃ to 560℃.With the annealing temperature increasing above 590℃ the crystal quality of the films degenerated. |
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| Keywords: | Sol-Gel method Zn1-xMgxO thin film crystal substrate |
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