| 退火温度对Ag-MgF2 颗粒膜结构和内应力的影响 |
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| 引用本文： | 李爱侠,孙大明,孙兆奇,宋学萍,刘艳美,赵宗彦,杨坤堂.退火温度对Ag-MgF2 颗粒膜结构和内应力的影响[J].安徽大学学报(自然科学版),2002,26(4):40-45. |
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| 作者姓名： | 李爱侠 孙大明 孙兆奇 宋学萍 刘艳美 赵宗彦 杨坤堂 |
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| 作者单位： | 安徽大学,物理系,安徽,合肥,230039 |
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| 基金项目： | 国家自然科学基金;59972001; |
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| 摘 要： | 报道用电子薄膜应力分布测试仪测量退火温度对Ag-MgF2复合颗粒薄膜内应力的影响,结果表明,退火温度在400℃,薄膜平均应力最小,应力分布比较均匀.XRD分析表明,Ag-MgF2复合颗粒薄膜的内应力主要来自Ag晶粒的生长过程,当Ag的晶格常数接近块体时(400℃温度退火60分钟),Ag-MgF2薄膜内应力最小.
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| 关 键 词： | Ag-MgF2复合颗粒薄膜 应力 退火温度 微结构 |
| 文章编号： | 1000-2162(2002)04-0040-06 |
Effect of anealing temperature on microstructure and residual stress in Ag-MgF2 complex grain films |
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| LI Ai-xia,SUN Da-ming,SUN Zhao-qi,SONG Xue-ping,LIU Yan-mei,ZHAO Zong-yan,YANG Kun-tang.Effect of anealing temperature on microstructure and residual stress in Ag-MgF2 complex grain films[J].Journal of Anhui University(Natural Sciences),2002,26(4):40-45. |
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| Authors: | LI Ai-xia SUN Da-ming SUN Zhao-qi SONG Xue-ping LIU Yan-mei ZHAO Zong-yan YANG Kun-tang |
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| Abstract: | This paper has investigated the effect of anealing on the residual stress and microstructure of Ag-MgF 2 complex grain films prepared by vapor deposition. X-ray diffraction (XRD) technique was employed to study the microstructure of the films. The results show that the average stress comes from growth of Ag grain, when the crystal lattice constants of Ag approach to the bulk values,the average stress of film is the least at 400℃ anealing temperature. |
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| Keywords: | Ag-MgF 2 complex grain film stress anealing temperature microstructure |
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