| 高压加速辉光放电离子阵鞘层离子轰击靶阴极的蒙特卡罗模拟 |
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| 引用本文： | 李百贵.高压加速辉光放电离子阵鞘层离子轰击靶阴极的蒙特卡罗模拟[J].河北大学学报(自然科学版),1997(1). |
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| 作者姓名： | 李百贵 |
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| 基金项目： | 河北省教委自然科学基金 |
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| 摘 要： | 用蒙特卡罗方法模拟计算了辉光放电中脉冲加速离子阵鞘层Ｎ＋１，Ｎ＋２离子到达靶阴极表面的能量分布和入射角分布。研究了靶室不同气压和不同温度下能量分布和入射角分布的变化
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| 关 键 词： | 辉光放电 离子注入 蒙特卡罗方法 |
A Monte Carlo Simulation for Bombarding Target with Pulsed Voltage-accelerated Ions in an Ion Sheath Generated in a Glow Discharge |
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| Li Baigui.A Monte Carlo Simulation for Bombarding Target with Pulsed Voltage-accelerated Ions in an Ion Sheath Generated in a Glow Discharge[J].Journal of Hebei University (Natural Science Edition),1997(1). |
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| Authors: | Li Baigui |
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| Institution: | Department of Physics Hebei University Baoding 071002 |
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| Abstract: | A Monte Carlo method is described for studing the energy and angle distributions of N + 1, N + 2 ions, which are in a glow discharge-generated ion sheath and are accelerated by pulsed voltage, when they arrive the cathode surface of the target. The changes of the energy and angle distributions under different gas pressures and temperatures in the target chamber are studied. |
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| Keywords: | Glow discharge Ion implantation Monte Carlo method |
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