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表面分析的新方法—(RHEED-TRAXS)和(SEM-TRAXS)
引用本文:姚子华.表面分析的新方法—(RHEED-TRAXS)和(SEM-TRAXS)[J].河北大学学报(自然科学版),1994(2).
作者姓名:姚子华
作者单位:Center of physical and Chemical Analysis,Baoding,Hebei University 071002
摘    要:本文综述在反射高能电子衍射仪中测量全反射角x射线谱(简称RHEED-TRAXS)的表面化学分析方法。对这种分析方法的基本原理、主要优点及应用作了概略介绍。本文还介绍了在扫描电镜中进行全反射角x射线谱(简称SEM-TRAXS)测量的方法及结果,并在文章的末尾指出了在扫描中实现(SEM-RHEED-TKAXS)的可能性。

关 键 词:反射高能电子衍射(RHEED),表面,表面分析,x射线全反射临界角,x射线能谱分析,扫描电子显微镜

The New Methods of Chemical Analysis for Surface-RHEED-TRAXS and SEM-TRAXS
Yao Zihua.The New Methods of Chemical Analysis for Surface-RHEED-TRAXS and SEM-TRAXS[J].Journal of Hebei University (Natural Science Edition),1994(2).
Authors:Yao Zihua
Abstract:A new nethod for chemical analysis of the surfaces by total reflaction angleX-ray spectroscopy in reflection high energy electron diffraction(RHEED-TRAXS)isdescribed.The fundamental principles and advantagies of the method and the applycationof the method to surface analysis are described.The total reflection angle X一rayspectroscopy in scanning electron microscopy(SEM-TRAXS)is also described.At end ofthe paper we prefigure that SEM-RHEED-TRAXS will arrive in scanning electronmicroscopy.
Keywords:Reflection high energy electron diffraction(RHEED)SurfaceSuface analysis Critical angle of X-ray total reflection X-ray energy dispersivespectroscopy  Scanning electron microscopy
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