| 金属-介质多层膜的光学特性 |
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| 引用本文： | 徐则川,李义兵.金属-介质多层膜的光学特性[J].华中科技大学学报(自然科学版),1997(1). |
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| 作者姓名： | 徐则川 李义兵 |
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| 作者单位： | 华中理工大学固体电子学系 |
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| 基金项目： | 国家高技术研究发展计划资助项目 |
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| 摘 要： | 分析了层结构对含极薄金属膜的金属－介质多层膜光学特性的影响，以及金属膜的光学常数及复合膜的光学特性与膜厚的关系．当金属膜为岛状膜时，多层膜的红外反射特性与岛状膜的几何参数有关，计算所得反射率与实验结果一致
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| 关 键 词： | 金属－介质多层膜 膜厚 岛状膜 光学特性 |
The Optic Properties of Multilayer Metal Dielectric Films |
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| Xu Zechuan Assoc. Prof., Dept. of Solid State Electronics,HUST,Wuhan ,China. Li Yibing.The Optic Properties of Multilayer Metal Dielectric Films[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,1997(1). |
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| Authors: | Xu Zechuan Assoc Prof Dept of Solid State Electronics HUST Wuhan China Li Yibing |
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| Institution: | Xu Zechuan Assoc. Prof., Dept. of Solid State Electronics,HUST,Wuhan 430074,China. Li Yibing |
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| Abstract: | The effect of layer structure in multilayer metal dielectric films with ultrathin metallic film on the optic properties is discussed. The relationships between the optic constants of the ultrathin metallic film and the optic properties of the multilayer films with the thickness of the films are given. The geometric parameters of metallic island film will affect the IR reflection characteristics of the multilayer films. The reflection spectrum calculated agree well with that by experiment. |
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| Keywords: | multilayer metal dielectric film film thickness island film optic properties |
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