| 基于微分相衬方法定量测量表面微观形貌 |
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| 引用本文： | 许忠保,叶虎年,叶梅,宋建萍.基于微分相衬方法定量测量表面微观形貌[J].华中科技大学学报(自然科学版),2004,32(2):64-66. |
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| 作者姓名： | 许忠保 叶虎年 叶梅 宋建萍 |
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| 作者单位： | 1. 华中科技大学,机械科学与工程学院,湖北,武汉,430074
2. 十堰职业技术学院,计算机系,湖北,十堰,442000 |
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| 基金项目： | 国家自然科学基金资助项目(10 176 0 10 ,30 170 2 76 ) |
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| 摘 要： | 改进了用于定量测量样品表面微观形貌的微分相衬干涉显微镜系统，对系统中由Nomarski棱镜引起的相位差△Φ进行了精确的计算和校正，系统不需要参考表面和机械扫描机构，能有效地抑制机械振动等外界环境干扰对测量结果的影响．并通过建立相应的数学模型推导了系统的点扩展函数．最后用维纳滤波算法恢复了图像，避免了普通逆滤波中的病态问题．
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| 关 键 词： | 表面微观形貌 微分相衬 点扩展函数 维纳滤波 |
| 文章编号： | 1671-4512(2004)02-0064-03 |
| 修稿时间： | 2003年7月25日 |
The quantitative determination of surface topography based on differential contrast method |
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| Xu Zhongbao Ye Hunian Ye Mei Song JianpingDoctoral Candidate, College of Mech. Sci. & Eng.,Huazhong Univ. of Sci. & Tech.,Wuhan ,China..The quantitative determination of surface topography based on differential contrast method[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,2004,32(2):64-66. |
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| Authors: | Xu Zhongbao Ye Hunian Ye Mei Song JianpingDoctoral Candidate College of Mech Sci & Eng Huazhong Univ of Sci & Tech Wuhan China |
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| Institution: | Xu Zhongbao Ye Hunian Ye Mei Song JianpingDoctoral Candidate, College of Mech. Sci. & Eng.,Huazhong Univ. of Sci. & Tech.,Wuhan 430074,China. |
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| Abstract: | Quantitative surface topography determination by diff er ential contrast microscope was improved in this paper. A new method of adjusting the phase difference caused by Normarski prism in the system was obtained. The influence of the mechanical vibration and environment was effectively repressed and reference surface and machine scan device were not needed in the systems. A restoration algorithm based on the mathematical models of point-spread function was proposed and a Wiener filter algorithm avoiding the illness condition in co mmon inverse filter gave the final restored images. |
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| Keywords: | surface topography differential contrast point-spread function Wiener filter |
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