| AlN/Al多层膜的红外反射谱研究 |
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| 引用本文： | 徐则川,李义兵.AlN/Al多层膜的红外反射谱研究[J].华中科技大学学报(自然科学版),1997(3). |
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| 作者姓名： | 徐则川 李义兵 |
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| 作者单位： | 长沙铁道学院 |
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| 基金项目： | 国家高技术研究发展计划资助 |
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| 摘 要： | 分析了含极薄金属膜的多层膜的红外反射谱，给出了一般的分析方法，包括：极薄金属膜的光学常数与膜厚的关系；岛状薄膜的光学常数与几何尺寸的关系；并进一步分析了多层膜中的表面电磁振动模及其对反射谱的影响．针对ＡｌＮ／Ａｌ多层膜的计算所得结果与实验相一致
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| 关 键 词： | 极薄金属膜 多层膜 电磁表面模 红外反射谱 |
An Investigation on Infrared Reflection Spectra of AlN/Al Multilayer Films |
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| Xu Zechuan Dept. of Solid State Electronics,HUST,Wuhan ,China. Li Yibing.An Investigation on Infrared Reflection Spectra of AlN/Al Multilayer Films[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,1997(3). |
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| Authors: | Xu Zechuan Dept of Solid State Electronics HUST Wuhan China Li Yibing |
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| Institution: | Xu Zechuan Dept. of Solid State Electronics,HUST,Wuhan 430074,China. Li Yibing |
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| Abstract: | This paper reports the infrared reflection spectra of multilayer films containing ultra thin metallic films. General analyses have been made on the optical properties of ultra thin metallic films, the relations between the optical constants of discontinuour island Al film and the geometric size, and the electromagnetic surface modes of the multilayer film and the influence on infrared reflection spectra. Computation results concerning AlN/Al multilayer films agree well with those obtained by experiment. |
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| Keywords: | ultra thin metallic film multilayer film EM surface mode IR reflection spectrum |
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