微/纳传动平台沿坐标轴运动分析的键合图法

采用柔顺机构学、材料力学、伪刚体法、卡氏定理及键合图基本理论,结合6自由度微/纳传动平台的工作原理,建立了桥式放大机构及微/纳传动平台的伪刚体模型及该平台沿坐标轴移动的键合图模型,推导了桥式放大机构的输出刚度方程、平台移动的特征方程及状态方程.通过Matlab/Simulink求解仿真分析,获得了该平台沿坐标轴移动的位移仿真曲线及柔性铰链角位移仿真曲线.应用Ansys13.0,对该平台进行了运动仿真分析,搭建了实验平台,进行了试验测量,并对Smulink仿真值、有限元分析值及实验值进行了对比分析,其结果变化规律基本一致,验证了利用键合图方法分析微/纳传动平台移动特性的正确性及可行性,为全柔性机构的研究提供了新的有效的方法.

Bond Graph Method for Analysis of Motion Along Coordinate Axis of Micro/Nano Transmission Platform

Abstract： The pseudo-rigid-body (PRB) models of bridge type amplification mechanism (BTAM) and micro/nano transmission platform (MNTP) and the bond graph model of the MNTP moving along the coordinate axis were established. The output stiffness of the BTAM and the characteristic equations and state equations of platform moving were deduced by using the compliant mechanism, mechanics of materials, the pseudo-rigid-body (PRB) method, Castigliano’s theorem, the bond graph theory, and the working principle of 6 degrees of freedom the MNTP. By using simulation analysis of Matlab/Simulink, the displacement simulation curve of the MNTP moving along the axis and the flexible hinge angular simulation curve were acquired. The Ansys13.0 was applied to the motion simulation analysis of the platform. The experimental platform was established, and the experimental test was conducted. The Simulink simulation, finite element analysis and experimental results were analyzed, and the result changes were basically the same. As a result, the correctness and feasibility of the bond graph model of MNTP moving along X/Y were verified, providing a new effective method for the study of flexible mechanism.