| 稀土纳米膜的制备及摩擦学性能 |
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| 引用本文： | 王梁,程先华.稀土纳米膜的制备及摩擦学性能[J].上海交通大学学报,2006,40(2):231-233,238. |
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| 作者姓名： | 王梁 程先华 |
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| 作者单位： | 上海交通大学,机械与动力工程学院,上海,200030 |
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| 基金项目： | 中国科学院资助项目;上海市纳米科技专项基金 |
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| 摘 要： | 在单晶硅和玻璃基片上用自组装的方法制备了稀土纳米膜,利用原子力显微镜(AFM)、接触角测量仪等测试手段对制备的薄膜进行了表征;并用自行研制的滑动往复式微摩擦测试系统测试了其摩擦特性.研究结果表明,在玻璃和单晶硅基片表面都成功地组装上了稀土自组装薄膜,未经表面改性的单晶硅和玻璃基片的摩擦系数分别为0.80和0.79,在其表面制备稀土纳米膜后的摩擦系数分别降低至0.16和0.11,同时耐磨性及摩擦稳定性都得到显著提高,显示了稀土纳米膜在微机构表面改性的潜在应用前景.
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| 关 键 词： | 稀土 纳米膜 摩擦 微机电系统 |
| 文章编号： | 1006-2467（2006）02-0230-03 |
| 收稿时间： | 2005-01-20 |
| 修稿时间： | 2005-01-20 |
The Preparation and Friction Behavior of Rare Earth Nanofilm |
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| WANG Liang,CHENG Xian-hua.The Preparation and Friction Behavior of Rare Earth Nanofilm[J].Journal of Shanghai Jiaotong University,2006,40(2):231-233,238. |
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| Authors: | WANG Liang CHENG Xian-hua |
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| Institution: | School of Mechanical Eng , Shanghai Jiaotong Univ , Shanghai 200030, China |
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| Abstract: | A self-assembly method was adopted to obtain rare earth(RE) nanofilm on the substrates of single-crystal silicon and glass.A sliding reciprocating micro friction tester was developed to carry out tribological investigation of the films.As a result,the RE nanofilms are of lower steady friction coefficient (COF) and better wearing resistance compared with the substrates,indicating their promising applications in microelectromechanical system(MEMS) field. |
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| Keywords: | rare earth(RE) nanofilm friction microelectromechanical system(MEMS) |
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