| 热处理对TiO2薄膜结构和表面形貌的影响 |
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| 引用本文： | 李云,王六定.热处理对TiO2薄膜结构和表面形貌的影响[J].河北科技师范学院学报,2008,22(2):62-65. |
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| 作者姓名： | 李云 王六定 |
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| 作者单位： | 1. 西安邮电学院,陕西,西安,710061;西北工业大学
2. 西北工业大学 |
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| 摘 要： | 研究了热处理对电子束蒸发法制备的TiO2薄膜结构和表面形貌的影响。利用X射线衍射仪和原子力显微镜，检测了TiO2薄膜的晶体结构和表面形貌。实验结果显示：沉积态TiO2薄膜为非晶态；低温（400℃以下）退火TiO2薄膜开始向锐钛矿相转变；高温退火（850℃以下）TiO2薄膜由锐钛矿向金红石相转变。
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| 关 键 词： | TIO2薄膜 电子束蒸发 热处理 锐钛矿 金红石 |
Influence of Annealing on the Structure and Surface Shape of TiO_2 Film |
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| LI Yun,WANG Liu-ding.Influence of Annealing on the Structure and Surface Shape of TiO_2 Film[J].Journal of Hebei Normal University of Science & Technology,2008,22(2):62-65. |
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| Authors: | LI Yun WANG Liu-ding |
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| Institution: | LI Yun1,2,WANG Liu-ding2(1 Department of Applied Physics,Xi\'an Institute of Post Telecommunications,2 Northwestern Polytechnical University,China) |
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| Abstract: | The influence of annealing temperature on the structure and surface shape of TiO2 film prepared by electron beam evaporation was studied. The micro-structure and surface were examined by XRD and AFM. The results showed that the TiO2 film evaporating at 200℃ was amorphous. After annealing at 400℃, anatase phase appeared in TiO2 film. After annealing at 850℃, anatase phase changed into rutile in TiO2 film. |
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| Keywords: | TiO2 thin film Electron beam evaporation Annealing Anatase Rutile |
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