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金属折射率虚部的激光衍射测量方法
引用本文:谢建平,陈农.金属折射率虚部的激光衍射测量方法[J].中国科学技术大学学报,1994,24(4):487-490.
作者姓名:谢建平  陈农
作者单位:中国科学技术大学,日本东京大学工学部
摘    要:在高精度激光衍射法的丝径测量中存在着偏振效应,用S和P分量的偏振光入射所得到的丝径测量值不相同.二者之差与金属折射率的虚部有关.在金属狭缝衍射实验中也观察到了这样的偏振效应.木文基于这些实验提出了金属折射率虚部的激光衍射测量方法.细丝直径或狭缝宽度随入射光振动与丝轴或缝边之间夹角变化的实验值经过曲线拟合可以得到金属折射率的虚部nk的数值,其精度约0.06。nk之值与其它方法的测量值在2%相对误差范围符合得很好.

关 键 词:激光衍射,光学折射率的虚部,测量

Measurement of the Imaginary Part of Metal Optical Index by Laser Diffraction
Xie Jianping, Chen Fenghua, Sun Xiaoquan, Wang Junmei, Zhou Chengang, Wu Yunxia, Ming Hai.Measurement of the Imaginary Part of Metal Optical Index by Laser Diffraction[J].Journal of University of Science and Technology of China,1994,24(4):487-490.
Authors:Xie Jianping  Chen Fenghua  Sun Xiaoquan  Wang Junmei  Zhou Chengang  Wu Yunxia  Ming Hai
Institution:Xie Jianping; Chen Fenghua; Sun Xiaoquan; Wang Junmei; Zhou Chengang; Wu Yunxia; Ming Hai (University of Science and Technology fo China)Chen Nong; Yoshiaki Nakano; Kunio Tada (The University fo Tokyo)
Abstract:The polarization effect appears in the high accuracy measurement of thin wire diameter by laser diffraction. The measuted diameter values obtained by the polarised incident light of S and P components are different. The difference between them is related to the imaginary part of metal optical index. The same polarization effect is observed in metal slit diffraction experiments. Based on these experiments, the measurement of the imaginary part of metal optical index by laser diffraction of thin wires or slits is proposed in the present paper. The curve of the measured wire diameter or slit width varying with respect to the angle between incident light vibration and wire axis or slit edges is fitted into their experimental values. Therefore, the imaginary part nk can.be figured out. Its accuracy is about 0. 06.The values of nk are in good agreement with those of other methods in the range of 2 % relative error. The measurement of uK by laser diffraction is fairly Simple.
Keywords:laser diffraction  imaginary port of optical index  measurement
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