| 一种新颖的三维零位标记 |
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| 引用本文： | 周成刚,叶锡标,张阳,黄文浩.一种新颖的三维零位标记[J].中国科学技术大学学报,2007,37(7):758-761. |
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| 作者姓名： | 周成刚 叶锡标 张阳 黄文浩 |
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| 作者单位： | 中国科学技术大学精密机械与精密仪器系,安徽合肥,230027 |
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| 基金项目： | 高等学校博士学科点专项科研项目 |
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| 摘 要： | 提出了一种新颖的三维零位对准标记.采用特殊编码的平面零位光栅通过分束棱镜成像在两个相互垂直的平面内,通过调节保证两平面在共有方向的零位重合,从而在三维空间内形成一个完善的X-Y-Z方向的原点重合的绝对坐标系,克服了现有技术只能进行一维或二维平面定位而不能实现在三维坐标系上进行绝对定位的缺点.这种三维零位标记系统简单,可以实现纳米级精度的三维绝对零位.
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| 关 键 词： | 三维零位 平面光栅 精密计量 位置传感器 |
| 文章编号： | 0253-2778（2007）07-0758-04 |
| 修稿时间： | 2006-09-282007-04-05 |
A novel three-dimensional zero-reference system |
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| ZHOU Cheng-gang,YE Xi-biao,ZHANG Yang,HUANG Wen-hao.A novel three-dimensional zero-reference system[J].Journal of University of Science and Technology of China,2007,37(7):758-761. |
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| Authors: | ZHOU Cheng-gang YE Xi-biao ZHANG Yang HUANG Wen-hao |
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| Institution: | Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China , Hefei 230027, China |
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| Abstract: | A novel three-dimensional zero-reference system was proposed.Two groups of specially coded planar zero-reference gratings were overlapped by beam splitter and imaging optics in two perpendicular planes.The zero reference signals of each plane were obtained from the same pair of gratings.The zeros of the two planes' common axis were overlapped by carefully adjusting of the position of the gratings,thus obtaining a perfect threedimensional absolute coordinate with overlapped zero reference in XYZ-direction.This novel three-dimensional zero-reference system can overcome the limit of former zero-reference gratings which can only determine one or two dimensional zero position.Experimental results prove that a measuring accuracy of nanometer degree can be achieved with this simple system. |
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| Keywords: | three-dimensional zero-reference planar grating precision metrology position encoder |
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