Complex microstructure fabrication by integrating silicon anisotropic etching and UV-LIGA technology |
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| Authors: | Jing Xiangmeng Chen Di Huang Chuang Chen Xiang Liu Jingquan Zhu Jun |
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| Institution: | National Key Laboratory of Micro/Nano Fabrication Technology, Key Laboratory for Thin Films and Microtechnology of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, P.R.China |
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| Abstract: | A fabrication method which integrates silicon anisotropic etching micromachining with UV-LIGA technology to make complex microstructures is presented.This proposod combined process enables the fabrication of high-aspect-ratio and three-dimensional(3D)microstmctures,which cannot be fabricated by silicon bulk micromachining or UV-LIGA alone.To demonstrate this combined method.the 100μm thick SU-8 micro gears were fabricated on the silicon convex square structure.which is 100μm×100μm×80μm in dimension.In the subsequent micro hot embossing process,a novel type of plastics polyethylene terephtalate glycol(PETG)Was tried for use.Through optimizing process parameters,PETG shows the potential of being used as plastic replica in micro-electro-mechanical system(MEMS).This fabrication technology provides a new option for the increasing need of functionality,quality and economy of MEMS. |
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| Keywords: | UV-LIGA bulk silicon micro machining 3D microfabrication polyethylene terephtalate glycol(PETG) |
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