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Effects of electric field fringe on performances of grid strip capacitive MEMS devices |
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| Institution: | [1]the Key Laboratory of RF Circuits and System of Ministry of Education, Hangzhou Dianzi University, Hangzhou 310018, P. R. China [2]State Key Laboratory of Transducer Technology, Chinese Academy of Sciences , Shanghai 200050, P. R. China [3]Toshiba Hydro-Electro Equipments Company, Hangzhou 311504, P. R. China |
| Abstract: | |
| Keywords: | micro-electro-mechanical system effect grid strip sensing capacitor MEMS noise （MEMS） capacitive sensor capacitor fringe |
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