| 溶胶-凝胶法制备SnO_2气敏薄膜的研究 |
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| 引用本文： | 刘威,曹立礼.溶胶-凝胶法制备SnO_2气敏薄膜的研究[J].中山大学学报(自然科学版),2001(3). |
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| 作者姓名： | 刘威 曹立礼 |
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| 作者单位： | 中山大学化学与化学工程学院!广东广州510275(刘威)，清华大学化学系!北京100084(曹立礼) |
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| 摘 要： | 以SnCl2 ·2H2 O及乙醇为原料 ,利用溶胶 -凝胶法制备SnO2 纳米薄膜 .探讨了制膜的工艺条件 ,用XRD、SEM、TEM、AES以及XPS等研究了所得薄膜的结构性质 ,同时考察了薄膜的晶相结构、晶粒尺寸、表面形貌以及薄膜中元素的化学状态与热处理条件之间的相互关系 .
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| 关 键 词： | 溶胶-凝胶法 SnO2薄膜材料 传感器 |
Preparation and Characterization of SnO_2 Film by Sol-Gel Method |
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| LIU Wei\ ,CAO Li_li\.Preparation and Characterization of SnO_2 Film by Sol-Gel Method[J].Acta Scientiarum Naturalium Universitatis Sunyatseni,2001(3). |
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| Authors: | LIU Wei\ CAO Li_li\ |
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| Institution: | LIU Wei\ 1,CAO Li_li\ 2 |
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| Abstract: | The SnO\-2 thin film was prepared by sol-gel method using tannous chloride and anhydrous ethanol.The preparing procedure was discussed.And the structure of SnO\-2 thin film was characterized by XRD, SEM, TEM, AES and XPS. The crystal structure,the size of the particles and the electronic structure of the thin film were described. |
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| Keywords: | Sol-Gel SnO\-2 thin film sensor |
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