Out-of-plane and In-plane piezoelectric behaviors of [Ba(Zr0.2Ti0.8)O3]–0.5(Ba0.7Ca0.3TiO3) thin films |
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作者姓名: | Zhi Tao Fei Che Yemei Han Fang Wang Zhengchun Yang Wen Qi Ying Wu Kailiang Zhang |
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摘 要: | The piezoelectric properties of Ba(Zr_(0.2)Ti_(0.8))O_3]–0.5(Ba_(0.7)Ca_(0.3)TiO_3)(abbreviated as BZT-0.5BCT) thin films deposited on Pt/Ti/SiO_2/Si substrates are reported in the present investigation. The effect of the distances between the target and substrate(d) on the morphology and out-of-plane piezoelectric properties was investigated.The experimental results showed that the ferroelectric domains size was dependent on the distance between the substrate and target and the ferroelectric domain growth was constrained by the grains. The samples exhibited well-defined out-of-plane butterfly loops and hysteresis loops and the one with d of 6.5 cm possessed the optimal ferroelectric properties and it exhibited good in-plane piezoelectric properties.
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收稿时间: | 18 January 2017 |
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