Glan-Thompson棱镜四层宽带减反射膜的设计与蒸镀

Glan-Thompson棱镜在光学领域有着重要的应用，透过率的高低和有效带宽的大小，直接影响着棱镜的品质．为了提高棱镜的透过率，拓宽有效使用带宽，利用薄膜特征矩阵的原理，设计了四层宽带减反射膜系，选用合适的光学薄膜材料，利用电子束蒸镀，借助于离子源辅助蒸镀，制作了高性能的宽带减反射膜．测试结果表明：平均剩余反射率小于1％，有效使用带宽达300nm，达到了设计要求．

Design and Deposition of Four Layers Antireflection Films Based on Glan-Thompson Prism

Glan_Thompson prism has important applications in optical field. The quality of prisms are directly affected by the transmissivity and the bandwidth. To improve the transmissivity and the bandwidth, the authors have designed four_layer broadband anti_reflecting coating using the theory of film feature matrix. During the course of evaporating, they selected suitable optical film materials and used electron bundle to evaporate with ion source evaporating, so they obtained broadband anti_reflecting film of high quality. The result of test indicates: the index of reflection is less than 1% and the effective bandwidth is 300 nm, which measure up to the demand of design.