溅射沉积纳米ZnO膜的表征及其性能

利用RF磁控溅射法在PET非织造布表面沉积氧化锌（ZnO）薄膜,并利用原子力显微镜（AFM）和能量弥散X-射线法（EDX）对ZnO薄膜的表面形貌和结构进行表征和分析.结果表明,沉积的ZnO颗粒具备纳米级尺度,且颗粒分布均匀、膜层致密,薄膜颗粒中只含有Zn和O两种元素;随着沉积时间的延长,ZnO呈多层生长模式.测试表明,经ZnO镀层处理的PET非织造布具有较强的紫外线屏蔽效果和优良的抗静电效果.

Characterization and Capability of Nano-ZnO Films Deposited by Sputtering

ZnO thin films are deposited on PET nonwoven substrates by RF magnetron sputtering. The morphology and the structure of the sputter-deposited films are observed by Atom Force Microscopy (AFM) and energy-dispersive X-ray (EDX). The results show that, the deposited ZnO grains in nano-levels, the grains distribute equality and compact; the films only contain Zn and O elements; with extend the time of deposition, the growth mode of ZnO is multi layer growth. The tests indicate that the PET nonwoven which is deposited by ZnO thin films has high ability of absorbency ultraviolet and has antistatic excellently.