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纳米Zn1-xCuxO薄膜的结构及光学性质
引用本文:陈学梅,诸葛兰剑,吴雪梅.纳米Zn1-xCuxO薄膜的结构及光学性质[J].苏州大学学报(医学版),2009,25(2):68-71.
作者姓名:陈学梅  诸葛兰剑  吴雪梅
作者单位:陈学梅,吴雪梅,Chen Xuemei,Wu Xuemei(苏州大学,物理科学与技术学院,江苏,苏州,215006);诸葛兰剑,Zhuge Lanjian(苏州大学,分析测试中心,江苏,苏州,215006)  
摘    要:采用射频磁控溅射制备了不同Cu掺杂浓度的ZnO薄膜.以X射线衍射、扫描电镜等对薄膜的结构和形貌进行了表征,XRD和SEM测试结果显示Cu掺杂量为5.0at.%时,Zno9,Cu0.05O薄膜呈纳米柱状结构.同时也对薄膜的光致发光(PL)进行了研究.结果表明,406nm的发光峰源于带边自由激子电子的复合,440nm的发光峰则和薄膜中的锌间隙Zni缺陷有关.

关 键 词:ZnO薄膜  Cu掺杂  结构  光致发光

The structure and optical properties of nano-crystalline Zn_(1-x)Cu_xO films
Chen Xuemei,Zhuge Lanjian,Wu Xuemei.The structure and optical properties of nano-crystalline Zn_(1-x)Cu_xO films[J].Journal of Suzhou University(Natural Science),2009,25(2):68-71.
Authors:Chen Xuemei  Zhuge Lanjian  Wu Xuemei
Institution:1.School of Physical Science and Technology;Suzhou Univ.;Suzhou 215006;China;2.Analysis and Testing Center;China
Abstract:Cu-doped ZnO films were prepared by radio frequency(RF) magnetron sputtering.The structure and morphology of films were studied using X-ray diffraction(XRD) and scanning electron microscope(SEM) while optical properties by photo-luminescence(PL) spectra.XRD and SEM results indicate that ZnO films doped with moderate Cu dopant 5.0 at.% can obtain wurtzite structure with nanorods aligned perpendicularly to the substrate surface.406 nm and 440 nm peaks due to free exciton recombination and structural defects s...
Keywords:ZnO films  Cu-doping  structure  photo-luminescence  
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