| 钯催化三氧化钨薄膜对氢气的感应特性 |
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| 引用本文： | 金光虎,李磊,王越,郝宗睿. 钯催化三氧化钨薄膜对氢气的感应特性[J]. 山东科学, 2012, 25(6): 1-4. DOI: 10.3976/j.issn.1002-4026.2012.06.001 |
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| 作者姓名： | 金光虎 李磊 王越 郝宗睿 |
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| 作者单位： | 山东省海洋环境监测技术重点实验室,山东省科学院海洋仪器仪表研究所，山东 青岛 266001 |
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| 摘 要： | 以对氢气易于反应的钯为催化材料、钯的沉积厚度和热处理条件为变量,研究三氧化钨薄膜的物理化学性能及气体反应特性。结果表明，三氧化钨在500 ℃以上时呈现四方晶体的多晶态，钯沉积对三氧化钨的晶体结构没有影响，但是随着钯的添加抑制了三氧化钨的晶粒生长。500 ℃以上热处理时钯在薄膜表面呈现小球状，600 ℃以上热处理时钯粒子在薄膜表面凝结或扩散到材料内部。沉积钯 2 nm的薄膜在工作温度250 ℃时反应灵敏度和恢复特性对氢气的检测特性最好。
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| 关 键 词： | 气体传感器 半导体薄膜 钯催化 |
| 收稿时间： | 2012-09-17 |
Sensing characteristics of Pd-Deposited WO3 thin film to hydrogen gas |
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| JIN Guang-hu,LI Lei,WANG Yue,HAO Zong-rui. Sensing characteristics of Pd-Deposited WO3 thin film to hydrogen gas[J]. Shandong Science, 2012, 25(6): 1-4. DOI: 10.3976/j.issn.1002-4026.2012.06.001 |
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| Authors: | JIN Guang-hu LI Lei WANG Yue HAO Zong-rui |
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| Affiliation: | Shandong Provincial Key Laboratory of Ocean Environmental Monitoring Technology, Institute ;of Oceanographic Instrumentation, Shandong Academy of Sciences, Qingdao 266001, China |
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| Abstract: | We investigated physicochemical and electrical properties of a Pd-deposited WO3 thin film based hydrogen gas sensor with Pd thickness, annealing temperature and operating temperature as variables. Experimental results show that WQ3 exhibits tetragonal polycrystalline at 500 ℃. The addition of Pd suppresses grain growth of WO3. Pd is an isolated small spherical grain on WQ thin film at 500 ℃. It agglomerates an irregular large grain or diffuses into WO3 at 600 ℃, A 2 nm Pd-deposited WO3 thin film shows good response and recovery property at 250 ℃. |
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| Keywords: | gas sensor semiconductor thin film Pd catalyst |
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