| 预退火工艺对Bi3.15Nd0.85Ti3O12铁电薄膜性质的影响 |
| |
| 引用本文： | 侯芳,臧涛成,李建康.预退火工艺对Bi3.15Nd0.85Ti3O12铁电薄膜性质的影响[J].苏州科技学院学报(自然科学版),2009,26(1):27-30. |
| |
| 作者姓名： | 侯芳 臧涛成 李建康 |
| |
| 作者单位： | 苏州科技学院,数理学院,江苏,苏州,215009 |
| |
| 基金项目： | 苏州科技学院科研基金 |
| |
| 摘 要： | 采用溶胶一凝胶法在Pt／Ti／SiO2/Si基片上制备了Bi3.15Nd0.85Ti3O12铁电薄膜。将薄膜分别进行每一层预退火、每二层预退火、每三层空气中500℃预退火10min，分别称为a．b、c组薄膜，最后都于氮气氛中680℃总退火0．5h。结果表明，预退火工艺对薄膜的铁电性能影响较大，而对取向基本没有影响。同时，a,b两组薄膜的铁电性能（2Pr分别为47．8μC／cm2。和51．9μC／cm2）远远优于c组薄膜的铁电性（2Pr=28．7 μC／cm2）。所有Bi3.15Nd0.85Ti3O12薄膜都呈现良好的抗疲劳特性。
|
| 关 键 词： | 溶胶-凝胶法 铁电薄膜 混合取向 抗疲劳特性 |
Effect of Annealing Treatment on the Properties of Bi3.15Nd0.85Ti3O12 Ferroelectric Films |
| |
| HOU Fang,ZANG Tao-cheng,LI Jian-kang.Effect of Annealing Treatment on the Properties of Bi3.15Nd0.85Ti3O12 Ferroelectric Films[J].Journal of University of Science and Technology of Suzhou,2009,26(1):27-30. |
| |
| Authors: | HOU Fang ZANG Tao-cheng LI Jian-kang |
| |
| Institution: | (School of Mathematics and Physics, SUST, Suzhou 215009, China) |
| |
| Abstract: | Bi3.15Nd0.85Ti3O12 ferroelectric films are deposited on Pt/Ti/SiO2/Si substrates by sol-gel process. The films are preannealed at 500 ℃ for 10 minutes every layer in the air, every two layers and every three layers, respectively. The three kinds of films are named Group a, Group b and Group c. Finally, the films are annealed at 500 ℃ for 30 minutes in nitrogen atmosphere. The results reveal that the ferroelectrieity of Bi3.15Nd0.85Ti3O12 sensitively depends on the preannealing treatment method, while the orientation of the films takes no dependence on it. Furthermore, Group a and Group b films have larger 2Pr value than Group c films. All the Bi3.15Nd0.85Ti3O12 films demonstrate fatigue-free characteristics. |
| |
| Keywords: | sol-gel process ferroelectric films mixed orientation fatigue-free characteristic |
| 本文献已被 维普 万方数据 等数据库收录！ |
|
