| SnO_2(F)、Fe_2O_3和ZnSe(Fe)薄膜厚度的测量 |
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| 引用本文： | 谭春雨,夏曰源,张汝贞,刘吉田,刘向东,许炳章,李淑英,陈有鹏,张淑芝.SnO_2(F)、Fe_2O_3和ZnSe(Fe)薄膜厚度的测量[J].山东大学学报(理学版),1993(2). |
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| 作者姓名： | 谭春雨 夏曰源 张汝贞 刘吉田 刘向东 许炳章 李淑英 陈有鹏 张淑芝 |
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| 作者单位： | 山东大学物理系，山东大学物理系，山东大学物理系，山东大学物理系，山东大学物理系，山东大学物理系，山东大学光电材料与器件研究所，山东大学光电材料与器件研究所，山东大学光学系 |
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| 摘 要： | 用RBS技术、椭偏法和微量天平称重法测量了掺氟SnO_2(FTO)透明导电膜、掺铁ZnSe磁性半导体膜和Fe_2O_3气敏元件膜的薄膜厚度.实验结果表明,RBS技术的测量数值与椭偏法以及微量天平称重法测得的结果符合得较好。
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| 关 键 词： | 常压CVD 椭圆偏振法 卢瑟福背散射 薄膜厚度 |
THICKNESS MEASUREMENT OF SnO_2,Fe_2O_3 AND ZnSe(Fe)FILMS |
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| Tan Chunyu,Xia Yueyuan,Zhang Ruzhen,Liu Jitian,Liu Xiangdong,Xu Bingzhang,Li Shuying,Chen Youpeng,Zhang Shuzhi Dept. of Physics,Shandong Univ.,Jinan Inst. of Optoelectronic Materials and Devices,Shandong Univ.,Jinan Dept. of Optics,Shandong Univ.,Jinan.THICKNESS MEASUREMENT OF SnO_2,Fe_2O_3 AND ZnSe(Fe)FILMS[J].Journal of Shandong University,1993(2). |
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| Authors: | Tan Chunyu Xia Yueyuan Zhang Ruzhen Liu Jitian Liu Xiangdong Xu Bingzhang Li Shuying Chen Youpeng Zhang Shuzhi Dept of Physics Shandong Univ Jinan Inst of Optoelectronic Materials and Devices Shandong Univ Jinan Dept of Optics Shandong Univ Jinan |
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| Abstract: | The thickness of fluorine-doped SnO_2 (FTO) films, iron-doped ZnSe films and Fe_2O_3films have been investigated by using RBS technique, Ellipsometry and Microbalance methods. It is shown that the results measured by RBS technique are agreement with results obtained by using Ellipsometry as well as Microbalance methods for FTO films and irondoped ZeSe films respectively. |
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| Keywords: | atmosphere pressure chemical vapor deposition (APCVD) ellipsometry backscattering spectrometry film thickness |
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