| 用金刚石膜的X射线衍射谱估算其热导率 |
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| 引用本文： | 罗廷礼,何奇宇,王志娜,崔文秀,蔡云虹,刁习刚,刘秀军.用金刚石膜的X射线衍射谱估算其热导率[J].河北省科学院学报,1999,16(2):31-34,39. |
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| 作者姓名： | 罗廷礼 何奇宇 王志娜 崔文秀 蔡云虹 刁习刚 刘秀军 |
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| 作者单位： | 河北省机电一体化中试基地 |
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| 摘 要： | 讨论直流电弧等离子体喷射化学气相沉积的金刚石膜其热导率和晶面取向间的关系，并介绍了利用Ｘ射线衍射图谱估算以（１１１）取向为主的三向系金刚石膜热导率的方法
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| 关 键 词： | 金刚石膜 热导率 X射线衍射谱 |
STUDY ON THE RELATION BETWEEN X-RAY DIFFRACTION SPECTRUM AND THERMAL CONDUCTIVITY OF DIAMOND FILM |
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| Luo Tingli,He Qiyu,Wang Zhina,Cui Wenxiu,Cai Yunhong,Diao Xigang,Liu Xiujun.STUDY ON THE RELATION BETWEEN X-RAY DIFFRACTION SPECTRUM AND THERMAL CONDUCTIVITY OF DIAMOND FILM[J].Journal of The Hebei Academy of Sciences,1999,16(2):31-34,39. |
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| Authors: | Luo Tingli He Qiyu Wang Zhina Cui Wenxiu Cai Yunhong Diao Xigang Liu Xiujun |
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| Institution: | Luo Tingli He Qiyu Wang Zhina Cui Wenxiu Cai
Yunhong Diao Xigang Liu Xiujun |
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| Abstract: | In this paper,the relation between crystal orientation
and thermal conductivity of diamond film is discussed by DC arc plasma jet CVD.A method of
evaluating thermal conductivity of diamond film is introduced by x-ray diffraction spectrum,and
there are three kinds of crystal orientation in diamond film that is mainly (111) orientation. |
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| Keywords: | Diamond film Thermal conductivity X-Ray diffraction spectrum |
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