TiO2纳米薄膜和TiO2／ZnFe2O4纳米复合薄膜的光学性能研究

用磁控溅射方法制备了ＴｉＯ２ 纳米薄膜和ＴｉＯ２／ＺｎＦｅ２Ｏ４ 纳米复合薄膜，研究了不同温度热处理和不同含量纳米铁酸锌对纳米ＴｉＯ２ 薄膜光学性能的影响。研究结果表明：用磁控溅射方法制备的纳米薄膜的厚度和晶粒尺寸均匀，并且随着热处理温度的升高而增大，掺杂纳米ＺｎＦｅ２ Ｏ４后ＴｉＯ２ 纳米薄膜的晶粒尺寸略有减小。ＸＲＤ 研究发现ＴｉＯ２／ＺｎＦｅ２Ｏ４ 纳米复合薄膜由非晶相向锐态矿相转变的温度高于纳米ＴｉＯ２ 薄膜。ＴｉＯ２ 纳米薄膜和ＴｉＯ２／ＺｎＦｅ２ Ｏ４ 纳米复合薄膜的光吸收边都随着晶粒尺寸的降低而发生蓝移，在相同热处理条件下，掺杂纳米ＺｎＦｅ２ Ｏ４ 后，纳米ＴｉＯ２薄膜的光吸收边发生了较大范围的红移，红移量随着掺杂量的增加而增大。通过热处理和掺杂纳米ＺｎＦｅ２Ｏ４ 可以实现对纳米ＴｉＯ２ 薄膜光吸收边大范围的调制。

A Study of the Optical Properties of TiO_2 Thin Filmsand TiO_2/ZnFe_2O_4 Nancomposite Films

TiO 2 thin films and TiO 2/ZnFe 2O 4 nanocomposite films have been prepared by rf magnetron sputtering. The optical properties of TiO 2 thin films were studied under different heat-treatment and different addition content of ZnFe 2O 4 nanoparticles. It was found that the thickness and the grain size of TiO 2 thin films are uniform,and the grain size of TiO 2 in thin films slightly decreases upon the addition of ZnFe 2O 4 nanoparticles. The crystallization temperature of TiO 2/ZnFe 2O 4 nanocomposite films is higher than that of TiO 2 thin films. The optical absorption edge of TiO 2 thin films and TiO 2/ZnFe 2O 4 nanocomposite films exhibits a blue shift with the decrease in grain size due to the quantum size effect. A very large red shift of the absorption edge of TiO 2 thin films occurs with the addition of ZnFe 2O 4 nanoparticles in comparison with that without addition, and the shift amount increases with theincrease in the content of ZnFe 2O 4 nanoparticles. The absorption edge of TiO 2 thin films can be modified in a large range upon the addition ZnFe 2O 4 nanoparticles and subsequently heat-treatment. The results are analysed and discussed.