| 微波功率对光学级金刚石膜生长的影响 |
| |
| 引用本文： | 毕冬梅,付志雄.微波功率对光学级金刚石膜生长的影响[J].长春大学学报,2012(6):676-677,687. |
| |
| 作者姓名： | 毕冬梅 付志雄 |
| |
| 作者单位： | 长春大学理学院 |
| |
| 基金项目： | 吉林省教育厅科研项目(吉教科合字2012第425号) |
| |
| 摘 要： | 采用微波PCVD系统进行了高品质透明金刚石膜的制备,在金刚石膜的沉积过程中,微波功率的变化直接影响着金刚石膜的生长和质量。用Raman,SEM等手段对金刚石膜的生长特性进行了表征。
|
| 关 键 词： | 金刚石膜 微波功率 膜的质量 |
Influences of Microwave Power on the Growth of Optical Grade Diamond Films |
| |
| BI Dong-mei,FU Zhi-xiong.Influences of Microwave Power on the Growth of Optical Grade Diamond Films[J].Journal of Changchun University,2012(6):676-677,687. |
| |
| Authors: | BI Dong-mei FU Zhi-xiong |
| |
| Institution: | (College of Science,Changchun University,Changchun 130022,China) |
| |
| Abstract: | Transparent diamond films with high quality are prepared by microwave PCVD system.During the process of deposition,the growth and quality of diamond films are influenced by the change of microwave power.The growth properties of diamond films are characterized by using Laman and SEM. |
| |
| Keywords: | diamond film microwave power quality of diamond film |
| 本文献已被 CNKI 维普 等数据库收录！ |
