射频电感耦合闭式等离子体产生与光谱诊断的实验

设计了一种闭式等离子体发生装置,采用射频电感耦合方式,以氩气为工作气体,在封闭式腔体低气压环境下进行放电实验。利用发射光谱法,测量了密闭腔体侧面方向的Ar谱线数据,研究了等离子体电子激发温度和电子密度随空间位置的分布规律以及不同射频功率对电子激发温度和电子密度的影响。等离子体中电子激发温度的变化通过玻尔兹曼斜率法进行分析,电子密度的变化则通过分析Ar原子750.4nm谱线强度变化获得。实验结果表明,该发生装置能够产生均匀持续的等离子体层,等离子体中电子激发温度约为9 500K。等离子体电子密度和电子激发温度随着输入射频功率的增加而增大,但变化幅度在减弱;当足够的输入功率时,等离子体层参数随位置的变化幅度较小。

Experimental Study of Generation and Spectroscopic Diagnosis of Inductively Coupled Plasma in Closed Cavity

In this paper, a closed plasma generator is designed. The discharge experiments are carried out in the closed cavity under low pressure environment by adopting the method of inductively coupled plasma(ICP) and taking argon as a working gas. The distribution rules of the electron excitation temperature, electron density, and the effect of RF power on the electron excitation temperature and electron density are investigated by means of emission spectrum. The changes in the electron excitation temperature are analyzed by using the method of the Boltzmann plot, and the variations in the electron density are derived from the analysis of Ar 750.38 nm line intensity. A uniform plasma sheet is produced stably by the closed plasma generator, in which the electron excitation temperature is about 9 500 K. The electron density and electro excitation temperature can be enhanced by improving RF power. With adequate input power, the variations of parameters of the closed plasma at different positions change little.