| ZnO的用途及其薄膜的制备方法 |
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| 引用本文： | 李海凤.ZnO的用途及其薄膜的制备方法[J].高等职业教育,2006,15(3):39-41. |
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| 作者姓名： | 李海凤 |
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| 作者单位： | 天津职业大学 天津300402 |
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| 摘 要： | 1引言近年来,由于光电子器件潜在的巨大市场,使光电材料成为研究的重点。ZnO薄膜是一种光学透明薄膜,纯ZnO及其掺杂薄膜具有优异光电性能,用途广阔,而且原料易得、价廉、毒性小,成为最有开发潜力的薄膜材料之一。目前,研究ZnO材料的性质涉及许多研究领域,其中包括:透明导电膜(T
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| 关 键 词： | 氧化锌 薄膜 制备技术 |
| 文章编号： | 1008-8415[2006]-03-0039-03 |
| 修稿时间： | 2006年4月22日 |
Application and Preparation of ZnO Thin Film |
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| LI Hai-feng.Application and Preparation of ZnO Thin Film[J].Higher Vocational Education:Journal of Tianjin Professional College,2006,15(3):39-41. |
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| Authors: | LI Hai-feng |
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| Abstract: | The development of the micro-structural,electrical and optical properties Of ZnO thin films is introduced. Various growth techniques of ZnO thin films,includinn mannetro sputterinn,chemical vapor deposition,spray pyrolysis,sol-nel procPSSinn,pulsed laser deposition,molecular beam epitaxy,atomic layer epitaxy and metal ornanic chemical vapor deposition were reviewed.The discussion and properties of the ZnO films grown by different growth techniques,together with their strengths and weaknesses. |
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| Keywords: | ZnO thin film preparation |
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