| 微波无极放电等离子体的温度分布轮廓 |
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| 引用本文： | 徐宇杰,陈大华,等.微波无极放电等离子体的温度分布轮廓[J].复旦学报(自然科学版),2001,40(3):296-299,304. |
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| 作者姓名： | 徐宇杰 陈大华 |
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| 作者单位： | 复旦大学电光源研究所，上海200433 |
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| 基金项目： | 上海市科学发展基金资助项目 (0 0 15 110 85 ) |
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| 摘 要： | 应用Elenbass-Heller局部能量平衡方程及TM010模式的微波场Maxwell方程，在简化的物理模型基础上采用数值计算的方法模拟得微波（2450MHz)无极放电的Hg等离子体的温度分布轮廓，通过自建实验装置的实验测量，将理论模拟与实验的结果进行对比验证，最后用赵肤效应的理论解释微波激发等离子体温度分布的特点，同时对微波等离子体的温度分布轮廓进行讨论。
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| 关 键 词： | 微波无极放电 温度分布轮廓 微波等离子体 趋肤效应 |
The Temperature Distribution of Microwave Electrodeless Discharging Plasma |
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| XU Yu jie,CHEN Da hua,ZUO Chun lan,CHEN Yu ming.The Temperature Distribution of Microwave Electrodeless Discharging Plasma[J].Journal of Fudan University(Natural Science),2001,40(3):296-299,304. |
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| Authors: | XU Yu jie CHEN Da hua ZUO Chun lan CHEN Yu ming |
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| Abstract: | Elenbass Heller local energy equation and Maxwell's equations in the cylindrical TM 010 mode were used to describe a simplified microwave discharging mode, then numerical procedure was applied so that the temperature distribution of microwave (2 450 MHz) discharging Hg plasma can be simulated. The simulation was acceptable compared the experiment result.The characteristic of temperature distribution of microwave discharging plasma was explained with skin effect theory. |
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| Keywords: | microwave electrodeless discharge temperature distribution microwave plasma skin effect |
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