| 用于超精微观形貌检测的STM研制 |
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| 引用本文： | 李尚平,张鸿海.用于超精微观形貌检测的STM研制[J].广西大学学报(自然科学版),1995,20(1):41-46. |
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| 作者姓名： | 李尚平 张鸿海 |
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| 作者单位： | 广西大学机械工程系，华中理工大学机械工程一系 |
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| 基金项目： | 国家自然科学基金,区教委基金 |
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| 摘 要： | 研制了一种具有原子级和纳米级分辨率的宽范围扫描隧道显微镜（ＳＴＭ），通过理论分析和实验论证，介绍纳米级精度微进给机构的原理及特点，研究了一种适于该仪器的简易、有效的隔振系统及探针夹持方法，并对夹持精度进行分析，实验结果表明该仪器可用于原子级与纳米级精度微观形貌的检测。
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| 关 键 词： | 隔振装置 微观形貌 STM 检测 |
The Developement of STM Used for Ultra-Precision Microtopography Detection |
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| Li Shangping,Cao Shuosheng,Zhang Honghai Xie Liangfu,Chen Riyao.The Developement of STM Used for Ultra-Precision Microtopography Detection[J].Journal of Guangxi University(Natural Science Edition),1995,20(1):41-46. |
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| Authors: | Li Shangping Cao Shuosheng Zhang Honghai Xie Liangfu Chen Riyao |
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| Abstract: | A long-rang scanning tunneling microscope(STM)with atomic and nm grade resolution is developed.Through theoretical analyses and experiment vertification,the principle and feature of a micro-feed mechanism are introduced.A simple and efficient vibration isolating system used for this instrument is studied.Furthermore,a simple and reliable tip holding method and its holding accuracy are also introduced.The experiment results indicated that this instrument can be used for detecting the microtopography with atomic and urn accuracy. |
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| Keywords: | vibration isolator probes/micro-feed mechanism scanning tunneling microscope tunneling voltage spectrum:microtopography |
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