微颗粒黏附力测试技术研究进展

 为了解微颗粒黏附力测试技术的研究进展,以Particle、Adhesion、Measurement为主题词,在Ei Compendex,Ei Inspec和Elsevier Science数据库中检索了2001—2010年收录的文献,共检索出150余篇有关微颗粒黏附力测试技术的文献。根据这些文献的发表时间、作者所属的国家和所研究的测试技术进行了统计分析。对各种微颗粒黏附力测试技术(AFM分离技术、微机械分离技术、离心分离技术、静电场分离技术、振动分离技术和激光分离技术)进行了分析和优缺点比较,并展望了该领域发展的前沿方向。

Progress in Micro-particle Adhesion Force Measurement Techniques

The adhesion and removal of micro-particles are very important for the quality control of many industrial processes. They are also directly related to the environmental pollution and occupational health. The study on micro-particle adhesion force measurement techniques is helpful to control micro-particles adhesion pollution and remove micro-particles on the surface. In order to understand the progress in the micro-particle adhesion force measurement techniques, the studies on this area are reviewed. Based on the databases (Ei Compendex, Ei Inspec, and Elsevier Science), three subject words (Particle, Adhesion, and Measurement) are used and about 150 papers in the area published in the years from 2001 to 2010 are found from the search results. The statistics analysis on the publication time, authors' countries, and topics of measurement techniques is conducted. Various micro-particle adhesion force measurement techniques including the AFM detachment technique, the micromechanical detachment technique, the centrifugal detachment technique, the electrostatic detachment technique, the vibration detachment technique, and the laser detachment technique are discussed. The advantages and disadvantages of those micro-particle adhesion force measurement techniques are compared with each other. In the end, the development directions on this field are pointed out.