| 应用射频磁控溅射方法制备声表面波器件用ZnO薄膜 |
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| 引用本文： | 章天金,顾豪爽.应用射频磁控溅射方法制备声表面波器件用ZnO薄膜[J].湖北大学学报(自然科学版),2002,24(3):232-234. |
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| 作者姓名： | 章天金 顾豪爽 |
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| 作者单位： | 湖北大学物理学与电子技术学院，湖北武汉430062 |
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| 基金项目： | 武汉市晨光计划(20015005032)项目 |
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| 摘 要： | 采有RF平面磁控溅射技术在单昌Si(100)衬底上淀积了ZnO薄膜。对退火前后ZnO薄膜的结构特性、化学组份以及缺陷特性进行了详细的研究。结果表明：在纯氧中高温退火（600℃）是改善ZnO压电薄膜的结构特性、化学组份并减少缺陷的良好方法。
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| 关 键 词： | 射频磁控溅射方法 制备 ZnO薄膜 氧化锌薄膜 声表面波器件 退火特性 n型半导体 薄膜结构 化学组份 |
| 文章编号： | 1000-2375(2002)03-0232-03 |
| 修稿时间： | 2002年5月22日 |
RF megnetic sputtering deposited zinc oxide films for surface acoustic wave applications |
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| Zhang Tianjin,Gu Haoshuang.RF megnetic sputtering deposited zinc oxide films for surface acoustic wave applications[J].Journal of Hubei University(Natural Science Edition),2002,24(3):232-234. |
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| Authors: | Zhang Tianjin Gu Haoshuang |
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| Abstract: | Zinc oxide (ZnO) thin films were deposited on Si( 100) byR.F. plane magnetic - control sputtering system.Structure of ZnO films,chemical compositions of Zn and 0 in the films,and the defect properties were investigated in detail for both the pre - annealed and annealed samples. It was proved that annealing in pure 02 at a high temperature is a practical way to improve the structure of the films and chemical compositions of Zn and 0 in the films, and decrease the defect density as well. |
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| Keywords: | magnetic - control sputtering system ZnO films SAW anneal |
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