| 纳米多孔InP对氨气的气敏特性研究 |
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| 引用本文： | 申惠娟,陈春彩,陈源福.纳米多孔InP对氨气的气敏特性研究[J].吉林师范大学学报（自然科学版）,2014(4):29-31. |
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| 作者姓名： | 申惠娟 陈春彩 陈源福 |
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| 作者单位： | 闽南理工学院 基础部,福建 石狮,362700 |
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| 基金项目： | 福建省中青年教师教育科研项目 |
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| 摘 要： | InP是继Si和GaAs之后的新一代电子功能材料,利用多孔半导体制成微型化和集成度较高的气敏传感器也一直是研究的热点,但对多孔InP的气敏特性研究甚少.本文拟通过电化学刻蚀方法制备纳米多孔InP,并观察其对氨气的伏安特性响应,从而分析该材料的气敏特性.
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| 关 键 词： | 纳米多孔InP 气敏特性 氨气 |
Research on Gas Sensing Property to Ammonia of Nano Porous InP |
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| SHEN Hui-juan,CHEN Chun-cai,CHEN Yuan-fu.Research on Gas Sensing Property to Ammonia of Nano Porous InP[J].Jilin Normal University Journal(Natural Science Edition),2014(4):29-31. |
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| Authors: | SHEN Hui-juan CHEN Chun-cai CHEN Yuan-fu |
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| Institution: | ( Department of Basic Science, Minnan University of Science and Technology, Shishi 362700, China) |
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| Abstract: | Following Si and GaAs,InP is a new generation of electronic functional materials. The preparation of gas sensors with high integration by using porous semiconductor has also been attracted the attention of researchers,but little work has been made for gas sensing properties of porous InP. In this paper,nano porous InP was prepared by electrochemical etching,and its responsing of the voltage current characteristic to ammonia was observed to analyze gas sensing properties of the prepared material. |
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| Keywords: | nano porous InP gas sensing properties ammonia |
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