| 超声微电机的发展及关键技术 |
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| 引用本文： | 陈嘉俊,鄂世举,盛敏,沈浩杰,朱亚志.超声微电机的发展及关键技术[J].科技咨询导报,2010(2):20-21. |
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| 作者姓名： | 陈嘉俊 鄂世举 盛敏 沈浩杰 朱亚志 |
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| 作者单位： | 浙江师范大学交通学院,浙江金华321004 |
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| 基金项目： | 浙江省钱江人才项目（2009R10010）及浙江省大学生科技创新项目资助. |
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| 摘 要： | 随着微机械、微电子技术的快速发展,毫米尺度的微型电机倍受重视,同时也对超声微电机提出了更高的技术要求。其中微型化、提高寿命及工作稳定性等是目前超声微电机研究中亟待解决的关键问题。本文分析了目前影响超声微电机应用的几个重要因素,提出了对应的关键技术及解决方案。
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| 关 键 词： | 微电机 超声 关键技术 影响因素 |
Development and Its Key Technology of Micro-ultrosonic Motor |
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| Chen Jiajun,E Shiju,Sheng Min,Shen Haojie,Zhu Yazhi.Development and Its Key Technology of Micro-ultrosonic Motor[J].Science and Technology Consulting Herald,2010(2):20-21. |
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| Authors: | Chen Jiajun E Shiju Sheng Min Shen Haojie Zhu Yazhi |
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| Institution: | (Transportation college of Zhejiang Normal University, Zhejiang,Jinhua 321004) |
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| Abstract: | With development of technology of MEMS,micro-ultrosonic motor with millimeter-size is attached importance,and a more higher technology demand is proposed to it.In kinds of technology parameters,smaller size,longer life and working reliability are the key issue to be studied.In this paper,some factors effecting on the applications of micro-ultrosonic motor are analysized,and the corresponding key technology and design concept are proposed. |
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| Keywords: | Micro-motor ultrosonic key technology affecting factor |
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