| 非晶硅磷掺杂效率分析的新方法 |
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| 引用本文： | 曾云,颜永红.非晶硅磷掺杂效率分析的新方法[J].湖南大学学报(自然科学版),1996,23(2):22-24. |
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| 作者姓名： | 曾云 颜永红 |
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| 作者单位： | 湖南大学应用物理系 |
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| 摘 要： | 介绍一种分析ａ－Ｓｉ掺杂效率的新方法。该法能够很好地解决ａ－Ｓｉ全掺杂范围内掺杂浓度和掺杂效率的计算问题，简便易行，为ａ－Ｓｉ掺杂性能研究和器件设计制造提供可靠的掺杂浓度和掺杂效率值。
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| 关 键 词： | 非晶硅 掺杂效率 磷 |
A New Method to Analyze the Phosphours-doping Efficiency on a-Si Film |
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| Zeng Yun,Yan Yonghong,Zeng Jianpin.A New Method to Analyze the Phosphours-doping Efficiency on a-Si Film[J].Journal of Hunan University(Naturnal Science),1996,23(2):22-24. |
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| Authors: | Zeng Yun Yan Yonghong Zeng Jianpin |
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| Abstract: | A new method to analyze the phosphours-doping efficiency was proposed. It solved the calculation problem of doping efficiency on a-Si film in the range of high-doping and low-doping. The method is simple and convenient. The accurate date of doping concentration and doping efficiency for studying doping property of a-Si material and for designing and manufacturing a-Si device can be provided by this method. |
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| Keywords: | amorphous silicon calculate doping efficiency |
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