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ZC36微电流测试仪测量非晶硅有效隙态密度
引用本文:唐元洪.ZC36微电流测试仪测量非晶硅有效隙态密度[J].湖南大学学报(自然科学版),1997,24(3):17-20.
作者姓名:唐元洪
作者单位:湖南大学应用物理系
摘    要:首次报告了用国产的廉价的ZC36型微电流测试仪测量非晶硅有效隙密度的原理和结果,其结果与美国生产的昂贵的4061A型半导综合测试仪测量结果相一致。

关 键 词:非晶硅  隙态密度  半导体  微电流测试仪

Measurement of Effective Density of Gap States in Amorphous Silicon with Type of ZC36 Microgalvanometer
Tang Yuanhong.Measurement of Effective Density of Gap States in Amorphous Silicon with Type of ZC36 Microgalvanometer[J].Journal of Hunan University(Naturnal Science),1997,24(3):17-20.
Authors:Tang Yuanhong
Abstract:The principle and result of measuring effective density of gap states in amor- phous silicon with type of ZC36 micmgalvanometer which is cheap equipment made in P R China are first reported in this paper. The result is in agreement with one measured with type of 4061A semiconductor synthetical measurement equipment which is expensive made in U . S. A.
Keywords:amorphous silicon  measurement equipment  gap state density
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