| 基于微粒群算法的半导体炉管区调度应用研究 |
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| 引用本文： | 秦小健,叶春明,马慧民.基于微粒群算法的半导体炉管区调度应用研究[J].上海理工大学学报,2006,28(5):499-502. |
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| 作者姓名： | 秦小健 叶春明 马慧民 |
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| 作者单位： | 上海理工大学,管理学院,上海,200093 |
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| 摘 要： | 提出了用微粒群算法来解决半导体炉管区的调度问题.给出了算法的具体过程及参数设置方案.实例计算的结果表明,该算法是解决半导体炉管区调度问题可行且高效的方法.
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| 关 键 词： | 半导体制造 炉管 批处理 微粒群算法 |
| 文章编号： | 1007-6735（2006）05-0499-04 |
| 收稿时间： | 2005-08-26 |
| 修稿时间： | 2005年8月26日 |
Particle swarm optimization approach for semiconductor furnace batch scheduling problem |
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| QIN Xiao-jian,YE Chun-ming,MA Hui-min.Particle swarm optimization approach for semiconductor furnace batch scheduling problem[J].Journal of University of Shanghai For Science and Technology,2006,28(5):499-502. |
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| Authors: | QIN Xiao-jian YE Chun-ming MA Hui-min |
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| Institution: | College of Management, University of Shanghai ,for Science and Technology, Shanghai 200093, China |
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| Abstract: | Particle swarm optimization(PSO) approach is applied for semiconductor manufacturing batch scheduling problem in the thesis.The detailed realization of the algorithe was illustrated.The computational results show that the PSO is a viable and effective approach to solve the semiconductor furnace batch scheduling problem. |
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| Keywords: | semiconductor manufacturing furnace batch scheduling particle swarm optimization |
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