| 氮化铝(AIN)薄膜的光学特性研究 |
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| 引用本文： | 韩莹,庄松林,袁一方.氮化铝(AIN)薄膜的光学特性研究[J].上海理工大学学报,1999(1). |
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| 作者姓名： | 韩莹 庄松林 袁一方 |
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| 作者单位： | 上海理工大学仪器仪表学院 |
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| 摘 要： | 研究了宽禁带Ⅲ－Ｖ族化合物半导体氮化铝（ＡＩＮ）薄膜的折射率及其热光特性，采用棱镜──薄膜耦合装置和自动温控光波导测试仪，测出不同温度下氮化铝薄膜的波导特性，利用迭代法可得到ＡＩＮ的折射率与温度变化的关系，并首次测得了ＡＩＮ薄膜的热光特性。
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| 关 键 词： | AIN，折射率，热光特性 |
Study on optical Property of aluminum nitride thin film |
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| Han Ying,Zhuang Songling,Yuan Yifang.Study on optical Property of aluminum nitride thin film[J].Journal of University of Shanghai For Science and Technology,1999(1). |
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| Authors: | Han Ying Zhuang Songling Yuan Yifang |
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| Abstract: | The refractive index and thermo-optic property of the wide bandgap -V com-pound semiconductor of nitride Aluminum nitride (AlN) thin film has been investigatal. Theweveguide property of AlN thin film under different tempemtures is measured using a prism-thinfilm coupling device and an automatic temperature controlling wnveguide measuring device.The dependence of the refractive index of AlN on changing temperature is obtained withiteration method. The thermo-optic property of AlN thin film is measured for the first time. |
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| Keywords: | AIN refractive index thermo-optic property |
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