医用不锈钢表面TiN薄膜的组织结构和力学性能研究

为改善医用不锈钢的耐磨性，采用反应磁控溅射在304不锈钢表面沉积了TiN薄膜，研究了Ti过渡层沉积时间对TiN薄膜微观结构和力学性能的影响。通过Ｘ射线衍射仪、扫描电子显微镜、纳米压痕仪、FST1000型薄膜应力测试仪、HSR-2M摩擦磨损试验机和WS-2005型涂层附着力自动划痕仪对样品进行微观组织表征和力学性能测试。结果表明，当Ti过渡层沉积时间为20 min，Ti过渡层厚度为340 nm时，TiN薄膜结晶性最强，硬度和弹性模量达到最大值，分别为21.6 GPa和327.5 GPa，平均摩擦因数达到最小值0.45，临界载荷达到最大值24.7 N，TiN薄膜的力学性能、摩擦性能以及与基体的结合力达到最优。进一步延长Ti过渡层的沉积时间，TiN薄膜的柱状晶组织粗化、力学性能、摩擦性能以及与基体的结合力均降低。

Study on microstructure and mechanical properties of the TiN film deposited on the surface of medical stainless steel

To improve the wear resistance of medical stainless steel, TiN films were prepared on 304 stainless steel surface by reactive magnetron sputtering. The effects of deposition time of Ti transition layer on the microstructure and mechanical properties of the films were studied. The microstructure and mechanical properties of the samples were analyzed by X-ray diffraction, scanning electron microscopy, nano-indentation technique, FST1000 film residual stress tester, HSR-2M friction wear testing machine and WS-2005 coating adhesion automatic scratch instrument. The results show that when the deposition time of Ti transition layer is 20 min, the thickness of the Ti transition layer is 340 nm, the crystallinity of the TiN film is the strongest, the hardness and the elastic modulus reach the maximum, which are 21.6 GPa and 327.5 GPa, respectively, the average friction coefficient reaches the minimum value of 0.45, the critical load reaches the maximum value of 24.7 N, and the mechanical properties, friction properties and adhesion with the matrix of the film reach the best. By further increasing the deposition time of Ti transition layer, the columnar crystal structure of the TiN film is coarsened, and the mechanical properties, friction properties and adhesion with the matrix of the TiN film are reduced.