| 等离子体反应溅射生成SnO_2气体传感器薄膜的研究 |
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| 引用本文： | 姚圣康,林玉枝.等离子体反应溅射生成SnO_2气体传感器薄膜的研究[J].福州大学学报(自然科学版),1992(1):26-30. |
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| 作者姓名： | 姚圣康 林玉枝 |
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| 作者单位： | 福州大学物理系硕士研究生
(姚圣康)，福州大学物理系(林玉枝) |
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| 摘 要： | 利用低温空气等离子体反应溅射技术淀积ＳｎＯ２薄膜，研究了ＳｎＯ２薄膜气敏元件对几种 可燃性气体的气敏效应及其性能；通过掺杂提高了元件的选择性，并对反应溅射机理和气敏机理 作了一些探讨．
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| 关 键 词： | SnO2多晶 气敏薄膜 反应溅射 |
Study of SnO_2 Thin Film Gas Sensors from Plasma Reactive Sputtering |
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| Yao Shengkang,Lin Yuzhi.Study of SnO_2 Thin Film Gas Sensors from Plasma Reactive Sputtering[J].Journal of Fuzhou University(Natural Science Edition),1992(1):26-30. |
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| Authors: | Yao Shengkang Lin Yuzhi |
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| Institution: | Department of Physics |
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| Abstract: | A method of depositing SnO_2 films by plasma reactive sputtering technique is in- troduced. The sensitivities of the thin fims thus formed to the several combustible gases and their various other properties are studied. Their selectivity has been increased by Pt doping. The mechanisms of reactive sputtering and gas sensor action are also discussed. |
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| Keywords: | SnO_2 polycrystal gas sensor film reactive sputtering |
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