| Nd掺杂ZnO薄膜的制备及室温光致发光研究 |
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| 引用本文： | 文军,陈长乐.Nd掺杂ZnO薄膜的制备及室温光致发光研究[J].四川师范大学学报(自然科学版),2008,31(6). |
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| 作者姓名： | 文军 陈长乐 |
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| 作者单位： | 1. 西北工业大学,应用物理系,陕西,西安,710072;渭南师范学院,物理系,陕西,渭南,714000
2. 西北工业大学,应用物理系,陕西,西安,710072 |
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| 基金项目： | 国家自然科学基金，陕西省教育厅资助项目 |
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| 摘 要： | 通过射频磁控溅射技术在Si(111)衬底上制备了Nd掺杂ZnO薄膜.XRD和AFM分析表明,Nd掺杂没有改变ZnO结构,薄膜为纳米多晶结构.随Nd掺杂量的增加颗粒减小,表面粗糙,起伏较大.室温光致发光谱显示,薄膜出现了395 nm的强紫光峰和495 nm的弱绿光峰,Nd掺杂量和氧分压对PL谱发射峰强度产生了一定影响.
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| 关 键 词： | Nd掺杂 ZnO薄膜 射频磁控溅射 光致发光 |
Study on Preparation and Photoluminescence Properties of Nd-doped ZnO Thin Film |
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| WEN Jun,CHEN Chang-le.Study on Preparation and Photoluminescence Properties of Nd-doped ZnO Thin Film[J].Journal of Sichuan Normal University(Natural Science),2008,31(6). |
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| Authors: | WEN Jun CHEN Chang-le |
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| Abstract: | The Nd-doped ZnO thin film is deposited on Si(111) substrate by RF magnetron sputtering.The analyses of XRD and AFM show that the structure of the thin film is not disturbed by Nd-doping and the thin film has a nano-multi-crystal structure.The surface of Nd-doped ZnO thin film is rough and the grain diameter of the thin films decreases with the increase of the neodymium content.The photoluminescence spectrum at room temperature indicates that the film has a strong purple band with 395 nm and weak green band with 495 nm,the peak intensity of photoluminescence spectra is affected by neodymium content and oxygen partial pressure. |
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| Keywords: | Nd-doped ZnO thin film RF magnetron sputtering Photoluminescence |
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