基于微元件键合图库的微机电系统动态建模与仿真

为了更好地支持微机电系统(MEMS)TopDown设计流程,针对MEMS仿真中的多能量域与非线性特点,采用键合图场元件与结型结构设计并实现了一个集中参数表达的MEMS键合图仿真元件库,同时基于该元件库提出了一种MEMS动态系统建模与仿真方法.采用参数化仿真模型与结构化体系构建的元件库,为MEMS设计流程中的概念设计阶段与系统级设计阶段的快速建模与仿真提供了方便,同时元件库内的所有元件均与MEMS器件级设计中的结构特征具有映射关系,这为用户需求空间功能原理空间结构空间之间的设计空间映射提供了方便.通过一个静电间隙执行器的系统建模过程与仿真结果,验证了利用该元件库进行建模与仿真的有效性.

Dynamic System Modeling and Simulation Using Bond Graph Based Micro Components Library for Micro Electro-Mechanical Systems

To realize the coupled simulation of complex and heterogeneous micro electro-mechanical systems (MEMS) and to support MEMS top-down design flow, a micro electro-mechanical components template library was designed and implemented on the basis of the lumped sub-models which consist of the multiport field and junction structures of bond graphs. According to this library, a methodology of dynamic modeling and simulation of MEMS was also proposed. Employed structured design methodology and parametric simulation models, this template library can be used for rapid creating a simulation model at the conceptual level and system level. Every model in the library was mapped with a structural feature at the component level to support the redesign processes of MEMS via the space mapping among requirements, functions and structures. Taking a gap-closing actuator as a verification, the correspondent modeling and simulation process is demonstrated in terms of this library.