真空中谐振微梁的品质因数

考虑到谐振微梁振动时，撞击在微梁两侧的分子数目和分子速率分布的差异，对Ｋａｄａｒ等人提出的撞击微梁的分子速率分布函数做了修正．利用修正后的模型，对真空中运动微梁的品质因数进行了理论分析．结果表明，修正后的理论值比原理论值与实验值符合得更好，对于谐振微梁结构参数的优化设计具有一定的指导意义．同时，在高真空区域，考虑了谐振微梁本征阻尼与分子碰撞耦合效应，消除了原有处理方法在该区域出现的折点．

Quality of Resonant Microbeam in Vacuum

The velocity distribution function is modified for impact of molecules in a microbeam given by Kadar. Analysed is quality factor of the resonant microbeam in vacuum. Deviations between the experimental data and the theoretical values by Kadar are then reduced, as an improvement to the design of resonant microbeams. Coupling effect between the intrinisic damping of resonant microbeam and the impact of molecules in high vacuum region is also considered. The break point is then eliminated.